I300I(国际300毫米推动专业协会)DemonstrationTestMethod
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I300I Demonstration Test Method
338
Lv.4
我是最棒的
看来是个好资料，DOWN下来慢慢学习一下。先多谢楼主了，下面帮忙摘要出DemonstrationTestMethod(DTM)文章的一些信息来。
[quote]
[b]Abstract:[/b]Revision1oftheDemonstrationTestMethod(DTM)incorporatestheexperienceofdeployingthe
DTMinmultipletestsandreflectsthechangingrequirementsfor1998and180nmprocesses.The
International300mmInitiative(I300I)DTMisaguidelineforcharacterizingprocessperformance
andreliabilityofsemiconductorICprocessandmetrologyequipmentatanydevelopmentmaturity.
Itprovidesamethodforexperimentationscaledtothematurityofthetoolorprocessbeingtested.
TheDTMiscomposedofthreestages:determinethematurityofthetoolorprocesstobetested,
selectandexecutetheappropriatetesting,andreportthetestresultsinastandardizedformat.
[b]Keywords:[/b]Equipment,TestMethods,ReliabilityTesting
[b]Authors:[/b]SteveFultonandDavidCarswell
[b]Approvals:[/b]SteveFulton,Author/ReliabilityProgramManager
RandyGoodall,AssociateDirectorofProductivityandInfrastructure
AshwinGhatalia,DirectorofProductivityandInfrastructure
LaurieModrey,TechnicalInformationTransferTeamLeader[/quote]
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cliffcrag
Lv.6
靓号：9999
是个好资料，顶顶。。
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zlh95222
Lv.1
好东西，收藏了！
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zhangxw
Lv.3
DemonstrationTestMethod(DTM):该名词中文怎样翻译才准确
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wuxianglin2000
Lv.1
还是没法下载！
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